Centre for High Resolution Transmission Electron Microscopy
FEI HELIOS NANOLAB 650
Focused ion beam SEM
The FEI Helios NanoLab DualBeam 650 is a scanning electron microscope (SEM) / focused ion beam (FIB) workstation capable of advanced nano-analysis and sample preparation. For site-specific TEM specimens, the FIB-SEM is routinely used to produce electron transparent membranes with the use of focused gallium ion beams. In addition, the Helios Nanolab 650 FIB-SEM boasts a wide variety of detectors capable of excellent SEM imaging quality (0.8 nm spatial resolution). The system architecture is optimised for automation, and features include Auto FIB, Auto TEM, and Auto Slice and View.
FEI Helios Nanolab 650
Preparation of a TEM lamella using the FIBSEM
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